M. Georgieva

High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties

E. Atanassova, M. Kalitzova, Giuseppe Zollo et al. · Thin Solid Films · 2003 · 69 citations

Natural Sciences, Materials Engineering, Materials Science +14

Influence of oxidation temperature on the microstructure and electrical properties of Ta2O5 on Si

E. Atanassova, D. Spassov, A. Paskaleva et al. · Microelectronics Journal · 2002 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electrical characteristics of Ti-doped Ta2O5 stacked capacitors

E. Atanassova, D. Spassov, A. Paskaleva et al. · Thin Solid Films · 2008 · 36 citations

Natural Sciences, Electrical Engineering, Materials Science +9

Conduction mechanisms and reliability of thermal Ta2O5–Si structures and the effect of the gate electrode

E. Atanassova, A. Paskaleva, N. Novkovski et al. · Journal of Applied Physics · 2005 · 34 citations

Engineering, Electrical Engineering, Materials Science +17

High-k HfO2–Ta2O5 mixed layers: Electrical characteristics and mechanisms of conductivity

E. Atanassova, M. Georgieva, D. Spassov et al. · Microelectronic Engineering · 2009 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +10