Concepedia

Publication | Closed Access

Influence of oxidation temperature on the microstructure and electrical properties of Ta2O5 on Si

DOI

40

Citations

32

References

2002

Year

E. Atanassova, D. Spassov, A. Paskaleva, J. Koprinarova, M. Georgieva
Microelectronics Journal

References

YearCitations

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