Statistics
Publications
1
Citations
11
H-Index
1
Active since
2011
Affiliations
KLA (United States)(Current)
Bryan Rhoads is an author at KLA (United States) specializing in computer engineering, critical dimension metrology, and process layout.
Publications per year
2011–2011
1
1
Process Window Centering for 22 nm Lithography
Ralf Buengener, Carol Boye, Bryan Rhoads et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 11 citations
1–1 of 1