Concepedia
Statistics
Publications
6
Citations
295
H-Index
Active since
1999
Affiliations
Lam Research (United States)(Current)
Applied Materials (United States)
University of Houston
Sandia National Laboratories
Theodoros Panagopoulos is an author at Lam Research (United States) specializing in natural sciences, plasma physics, and physics.
Publications per year
1999–2023
Plasma sheath model and ion energy distribution for all radio frequencies
Theodoros Panagopoulos, Demetre J. Economou · Journal of Applied Physics · 1999 · 146 citations
Natural Sciences, Electrical Engineering, Physics +14
Three-dimensional simulation of an inductively coupled plasma reactor
Theodoros Panagopoulos, Doosik Kim, Vikas Midha et al. · Journal of Applied Physics · 2002 · 57 citations
Natural Sciences, Physics, Computational Fluid Dynamics +16
Dry etching in the presence of physisorption of neutrals at lower temperatures
Thorsten Lill, Ivan L. Berry, Meihua Shen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023 · 44 citations
Natural Sciences, Chemistry, Materials Science +17
Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges
E. V. Barnat, Paul Miller, G. A. Hebner et al. · Applied Physics Letters · 2007 · 20 citations · Full text
Natural Sciences, Electrical Engineering, Physics +15
Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge
E. V. Barnat, Paul Miller, G. A. Hebner et al. · Plasma Sources Science and Technology · 2007 · 15 citations · Full text
Natural Sciences, Physics, Electromagnetics +13
1–5 of 6