Concepedia

Tod Robinson

TR

2

Publications

28

Citations

2

H-Index

2013

Active since

Affiliations

Toppan (United States)(Current)

Tod Robinson is an author at Toppan (United States) specializing in applied physics, defect tolerance, and microfabrication.

Top concepts

EngineeringApplied PhysicsDefect ToleranceMaterial ScienceMicrofabricationMicroscopyTechnologyOphthalmologyNanotechnologySurface Science

Publications per year

2013–2014

2

Publications

2

Through-focus EUV multilayer defect repair with nanomachining

Gregory McIntyre, Emily Gallagher, Tod Robinson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations

Engineering, Electron-beam Lithography, Microscopy +18

Repairing native defects on EUV mask blanks

Mark Lawliss, Emily Gallagher, M. Hibbs et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

Materials Science, Native Defects, Engineering +15

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