Statistics
Publications
3
Citations
83
H-Index
3
Active since
2015
Affiliations
ASML (Netherlands)(Current)
Alex Schafgans is an author at ASML (Netherlands) specializing in microelectronics, semiconductor devices, and materials science.
Publications per year
2015–2023
3
3
EUV light source for high-NA and low-NA lithography
K. R. Umstadter, Matt W. Graham, Michael Purvis et al. · 2023 · 20 citations
1–3 of 3