Statistics
Publications
3
Citations
72
H-Index
3
Active since
1997
Affiliations
Silicon Labs (United States)(Current)
John Tseng-Chung Lee is an author at Silicon Labs (United States) specializing in etching processes, etching, and plasma etching.
Publications per year
1997–2002
3
3
Edward A. Rietman, John Tseng-Chung Lee, Nace Layadi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 14 citations
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