Yoshihisa Iba

Mechanism of porous low-k film damage induced by plasma etching radicals

Yoshihisa Iba, Shiro Ozaki, Makoto Sasaki et al. · Microelectronic Engineering · 2009 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +14

Effects of Etch Rate on Plasma-Induced Damage to Porous Low-k Films

Yoshihisa Iba, Tomoyuki Kirimura, Makoto Sasaki et al. · Japanese Journal of Applied Physics · 2008 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +17

Changes in the specificity of antibodies against steroid antigens by introduction of mutations into complementarity-determining regions of the V(H) domain

Yoshihisa Iba, Nobuhiro Hayashi, Jun-ichi Sawada et al. · Protein Engineering Design and Selection · 1998 · 23 citations · Full text

Pharmacy, Biochemistry, Endocrinology +17

A 65 nm CMOS technology with a high-performance and low-leakage transistor, a 0.55 μm/sup 2/ 6T-SRAM cell and robust hybrid-ULK/Cu interconnects for mobile multimedia applications

S. Nakai, M. Kojima, N. Misawa et al. · 2004 · 19 citations

Engineering, Computer Engineering, Electrical Engineering +17

45 nm-node BEOL integration featuring porous-ultra-low-k/Cu multilevel interconnects

I. Sugiura, Yoshihiro Nakata, N. Misawa et al. · 2005 · 14 citations

Engineering, Electrical Engineering, Materials Engineering +17