Concepedia

N. Misawa

NM

4

Publications

68

Citations

4

H-Index

1994

Active since

Affiliations

Fujitsu (Japan)(Current)

N. Misawa is an author at Fujitsu (Japan) specializing in electronic packaging, microelectronics, and electrical engineering.

Top concepts

EngineeringMicroelectronicsElectronic PackagingElectrical EngineeringApplied PhysicsNanoelectronicsNanotechnologyMaterial ScienceComputer EngineeringVlsi Design

Publications per year

1994–2008

4

Publications

4

Planarized Copper Multilevel Interconnections for ULSI Applications

N. Misawa, Takayuki Ohba, Hideshi Yagi · MRS Bulletin · 1994 · 24 citations

Copper Multilevel Interconnections, Electrical Engineering, Engineering +6

A 65 nm CMOS technology with a high-performance and low-leakage transistor, a 0.55 μm/sup 2/ 6T-SRAM cell and robust hybrid-ULK/Cu interconnects for mobile multimedia applications

S. Nakai, M. Kojima, N. Misawa et al. · 2004 · 19 citations

Engineering, Vlsi Design, Mobile Multimedia Applications +17

45 nm-node BEOL integration featuring porous-ultra-low-k/Cu multilevel interconnects

I. Sugiura, Yoshihiro Nakata, N. Misawa et al. · 2005 · 14 citations

Materials Science, 3D Ic Architecture, Electrical Engineering +15

Investigation of stress-induced voiding inside and under VIAS in copper interconnects with &#x201C;wing&#x201D; pattern

Hideya Matsuyama, Takashi Suzuki, H. Ehara et al. · 2008 · 11 citations

Engineering, Residual Stress, Stress Gradient +19

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