Tomoyuki Kirimura - Concepedia

Author

Tomoyuki Kirimura

Also Known As

T. Kirimura, Tomoyuki Kirimura

Publications

143

Citations

H-Index

Concepts

All Affiliations

Tomoyuki Kirimura is an author at Fujitsu (Japan) specializing in materials science, applied physics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	103
2	Applied Physics	4	4	103
3	Natural Sciences	1	1	30
4	Chemical Engineering	1	1	28
5	Materials Engineering	1	1	28

Tomoyuki Kirimura

Publications

103

Citations

H-Index

Page 1

	Year	Citations
Mechanism of porous low-k film damage induced by plasma etching radicals Yoshihisa Iba, Shiro Ozaki, Makoto Sasaki, Microelectronic Engineering Materials ScienceEngineeringSurface ScienceApplied PhysicsPlasma Etching Radicals	2009	32
Acoustic Pulse Echoes Probed with Time-Resolved X-Ray Triple-Crystal Diffractometry Yujiro Hayashi, Yoshihito Tanaka, Tomoyuki Kirimura, Physical Review Letters X-ray SpectroscopyEngineeringLaser ApplicationsAcoustic Pulse EchoesHigh-power Lasers	2006	30
Effects of Etch Rate on Plasma-Induced Damage to Porous Low-k Films Yoshihisa Iba, Tomoyuki Kirimura, Makoto Sasaki, Japanese Journal of Applied Physics Materials EngineeringMaterials ScienceChemical EngineeringEngineeringEtch Rate	2008	28
<i>In-situ</i> scanning electron microscope observation of electromigration-induced void growth in 30 nm ½ pitch Cu interconnect structures Kris Vanstreels, P. Czarnecki, Tomoyuki Kirimura, Journal of Applied Physics Materials ScienceIn-situ Electromigration TestsElectromigration TechniqueEngineeringElectrode-electrolyte Interface	2014	13

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