Concepedia

Henry Berger

HB

Statistics

Publications

4

Citations

71

H-Index

4

Active since

1968

Affiliations

MCNC Research and Development Institute(Current)

Henry Berger is an author at MCNC Research and Development Institute specializing in engineering, air pollution, and air quality.

Top concepts

EngineeringAir QualityAir PollutionApplied PhysicsEnvironmental EngineeringPhysicsMedicineChemistryPhotonicsTechnology

Publications per year

1968–1993

4

Publications

4

The Effects of Contamination on Semiconductor Manufacturing Yield

C. M. Osburn, Henry Berger, R. P. Donovan et al. · Journal of the IEST · 1988 · 27 citations

Defect Tolerance, Electrical Engineering, Wafer Scale Processing +14

Quantitative analysis of contaminants in ultrapure gases at the parts-per-trillion level using atmospheric pressure ionization mass spectroscopy

Kevin Siefering, Henry Berger, Walter Whitlock · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 18 citations

Engineering, Air Quality, Plasma Physics +29

Contamination due to process gases

Henry Berger · Microelectronic Engineering · 1991 · 13 citations

Hazardous Waste, Environmental Chemistry, Air Sampling +5

Guided Waves in Moving Dispersive Media Part I: Nonrelativistic Velocities

Henry Berger, J.W.E. Griemsmann · IEEE Transactions on Microwave Theory and Techniques · 1968 · 13 citations

Electromagnetic Wave, Photonics, Waveguide Walls +13

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