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Andrew Liang

AL

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Publications

1

Citations

12

H-Index

1

Active since

2017

Affiliations

Lam Research (United States)(Current)

Andrew Liang is an author at Lam Research (United States) specializing in optical materials, computer engineering, and microelectronics.

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Publications per year

2017–2017

1

Publications

1

Integrated approach to improving local CD uniformity in EUV patterning

Andrew Liang, Jan Hermans, Timothy H. Tran et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 12 citations

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