I N Kots is an author at Southern Federal University specializing in nanotechnology, applied physics, and instrumentation.
Top concepts
MicroscopyEngineeringNanotechnologyApplied PhysicsInstrumentationIon Beam PhysicsMaterial ScienceMicrofabrication
Publications per year
2015–2019
2
2
Studying the Regimes of Silicon Surface Profiling by Focused Ion Beams
I N Kots, A. S. Kolomiitsev, S A Lisitsyn et al. · Russian Microelectronics · 2019 · 22 citations
Rows per page
1–2 of 2