K.J. Winchester

Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

Han Huang, K.J. Winchester, Alexandra Suvorova et al. · Materials Science and Engineering A · 2006 · 189 citations

Materials Science, Materials Engineering, Low-temperature Pecvd Silicon +11

Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry–Pérot optical filters

Han Huang, K.J. Winchester, Yinong Liu et al. · Journal of Micromechanics and Microengineering · 2005 · 73 citations

Intrinsic Stress Gradient, Optical Materials, Engineering +20

Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

C.A. Musc, J. Antoszewski, K.J. Winchester et al. · IEEE Electron Device Letters · 2005 · 59 citations

Photonic Sensor, Optical Materials, Engineering +23

Tunable Fabry-Pérot cavities fabricated from PECVD silicon nitride employing zinc sulphide as the sacrificial layer

K.J. Winchester, J.M. Dell · Journal of Micromechanics and Microengineering · 2001 · 43 citations

Engineering, Microelectromechanical Systems, Optoelectronic Devices +23

Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films

Byron Walmsley, Yinong Liu, Xiaozhi Hu et al. · Journal of Applied Physics · 2005 · 30 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +17