Concepedia

Byron Walmsley

BW

Statistics

Publications

6

Citations

144

H-Index

6

Active since

2005

Affiliations

The University of Western Australia(Current)

Byron Walmsley is an author at The University of Western Australia specializing in engineering, thin films, and materials science.

Top concepts

Thin FilmsEngineeringMaterial ScienceApplied PhysicsMaterials EngineeringMicrostructureSurface ScienceMicrofabricationMechanical PropertiesMechanical Engineering

Publications per year

2005–2007

6

Publications

6

Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films

Byron Walmsley, Yinong Liu, Xiaozhi Hu et al. · Journal of Microelectromechanical Systems · 2007 · 40 citations

Materials Science, Materials Engineering, Electrical Engineering +11

Effect of oxidation on the chemical bonding structure of PECVD SiNx thin films

Neerushana Jehanathan, Yinong Liu, Byron Walmsley et al. · Journal of Applied Physics · 2006 · 31 citations · Full text

Materials Engineering, Materials Science, Semiconductors +11

Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films

Byron Walmsley, Yinong Liu, Xiaozhi Hu et al. · Journal of Applied Physics · 2005 · 30 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +17

Determination of mechanical properties of silicon nitride thin films using nanoindentation

Mariusz Martyniuk, J. Antoszewski, Byron Walmsley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations

Oxidation of PECVD SiNx thin films

Neerushana Jehanathan, Byron Walmsley, Yinong Liu et al. · Journal of Alloys and Compounds · 2006 · 14 citations

Materials Science, Materials Engineering, Engineering +4

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