Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films - Concepedia

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Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

189

Citations

20

References

2006

Year

Han Huang, K.J. Winchester, Alexandra Suvorova, Brian R. Lawn, Yinong Liu, Xiaozhi Hu, J.M. Dell, L. Faraone

Materials Science and Engineering A

Materials ScienceMaterials EngineeringLow-temperature Pecvd SiliconEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsPulsed Laser DepositionSemiconductor Device FabricationDeposition ConditionsThin FilmsElectronic PackagingChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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