Hironobu Miya

Electrical and physical properties of HfO2 films prepared by remote plasma oxidation of Hf metal

Kazuhiko Yamamoto, Shigenori Hayashi, M. Niwa et al. · Applied Physics Letters · 2003 · 67 citations

Engineering, Oxidation Resistance, Remote Plasma Oxidation +18

Infrared Study of Tris(dimethylamino)silane Adsorption and Ozone Irradiation on Si(100) Surfaces for ALD of SiO[sub 2]

Yuta Kinoshita, Fumihiko Hirose, Hironobu Miya et al. · Electrochemical and Solid-State Letters · 2007 · 46 citations

Further Tdmas Adsorption, Engineering, Chemistry +16

Atomic layer deposition of SiO2 from Tris(dimethylamino)silane and ozone by using temperature-controlled water vapor treatment

Fumihiko Hirose, Yuta Kinoshita, Suguru Shibuya et al. · Thin Solid Films · 2010 · 41 citations

Environmental Chemistry, Chemical Engineering, Engineering +8

Metalorganic Chemical Vapor Deposition of HfO₂Films through the Alternating Supply of Tetrakis(1-methoxy-2-methyl-2-propoxy)-Hafnium and Remote-Plasma Oxygen

Sadayoshi Horii, Kazuhiko Yamamoto, M. Asai et al. · Japanese Journal of Applied Physics · 2003 · 21 citations

Materials Science, Materials Engineering, Alternating Supply +15

Corrosion Protect DLC Coating on Steel and Hastelloy

Hironobu Miya, Jie Wang · MATERIALS TRANSACTIONS · 2008 · 14 citations · Full text

Materials Engineering, Materials Science, Chemical Engineering +14