Concepedia

Author

Hironobu Miya

Hitachi (Japan)

Also Known As

H. Miya, Hironobu MIYA, Hironobu Miya

23

Publications

241

Citations

7

H-Index

22

Concepts

All Affiliations

Hitachi (Japan)Panasonic (Japan)ShinEtsu Chemical (Japan)Tohoku UniversityYamagata University
HM

About

Hironobu Miya is an author at Hitachi (Japan) specializing in engineering, chemistry, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

202

2

Chemistry

6

6

202

3

Applied Physics

3

3

126

4

Chemical Engineering

3

3

101

5

Natural Sciences

1

1

46

Hironobu Miya

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6

Publications

202

Citations

6

H-Index

YearCitations

Electrical and physical properties of HfO2 films prepared by remote plasma oxidation of Hf metal

Kazuhiko Yamamoto, Shigenori Hayashi, M. Niwa,

Applied Physics Letters

2003

67

Infrared Study of Tris(dimethylamino)silane Adsorption and Ozone Irradiation on Si(100) Surfaces for ALD of SiO[sub 2]

Yuta Kinoshita, Fumihiko Hirose, Hironobu Miya,

Electrochemical and Solid-State Letters

2007

46

Atomic layer deposition of SiO2 from Tris(dimethylamino)silane and ozone by using temperature-controlled water vapor treatment

Fumihiko Hirose, Yuta Kinoshita, Suguru Shibuya,

Thin Solid Films

2010

41

Metalorganic Chemical Vapor Deposition of HfO<sub>2</sub>Films through the Alternating Supply of Tetrakis(1-methoxy-2-methyl-2-propoxy)-Hafnium and Remote-Plasma Oxygen

Sadayoshi Horii, Kazuhiko Yamamoto, M. Asai,

Japanese Journal of Applied Physics

2003

21

Corrosion Protect DLC Coating on Steel and Hastelloy

Hironobu Miya, Jie Wang

MATERIALS TRANSACTIONS

2008

14

Impact of Hf Metal Predeposition on the Properties of HfO<sub>2</sub>Grown by Physical and Chemical Vapor Deposition

Kazuhiko Yamamoto, Shigenori Hayashi, M. Niwa,

Japanese Journal of Applied Physics

2003

13

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