Statistics
Publications
4
Citations
133
H-Index
4
Active since
2001
Affiliations
Y. Imaoka is an author at Toshiba (Japan) specializing in materials science, flash lamp annealing, and semiconductor devices.
Publications per year
2001–2003
4
4
Flash lamp annealing technology for ultra-shallow junction formation
Takayuki Ito, K. Suguro, M. Tamura et al. · 2002 · 17 citations
Flash Lamp Anneal Technology for Effectively Activating Ion Implanted Si
Takayuki Ito, T. Iinuma, Atsushi Murakoshi et al. · 2001 · 13 citations
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