Concepedia

James A. McClay

JA

2

Publications

25

Citations

2

H-Index

1996

Active since

Affiliations

Carl Zeiss (Germany)(Current)

James A. McClay is an author at Carl Zeiss (Germany) specializing in photonics, ophthalmology, and computational imaging.

Top concepts

Publications per year

1996–2003

2

Publications

2

Optical lithography solutions for sub-65-nm semiconductor devices

Jan Mulkens, James A. McClay, Bruce A. Tirri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

<title>Micrascan III: 0.25-um resolution step-and-scan system</title>

David M. Williamson, James A. McClay, Keith W. Andresen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 12 citations

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