Concepedia

Bruce A. Tirri

BA

Statistics

Publications

2

Citations

23

H-Index

2

Active since

2003

Affiliations

ASML (Netherlands)(Current)

Bruce A. Tirri is an author at ASML (Netherlands) specializing in lens performance evaluation, physics, and optical lithography.

Publications per year

2003–2008

2

Publications

2

Optical lithography solutions for sub-65-nm semiconductor devices

Jan Mulkens, James A. McClay, Bruce A. Tirri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

, , +10

Deposition and characterization of challenging DUV coatings

P. Kelkar, Bruce A. Tirri, Ron Wilklow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

, , +17

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