Concepedia

David Steber

DS

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Publications

2

Citations

38

H-Index

2

Active since

2013

Affiliations

IBM (United States)(Current)

David Steber is an author at IBM (United States) specializing in surface cleaning, materials engineering, and chemical cleaning.

Publications per year

2013–2013

2

Publications

2

Post Cu CMP Cleaning of Polyurethane Pad Debris

Wei‐Tsu Tseng, Elliott Rill, Benjamin Backes et al. · ECS Journal of Solid State Science and Technology · 2013 · 20 citations

, , +11

Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology

Wei‐Tsu Tseng, Vamsi Devarapalli, James Steffes et al. · IEEE Transactions on Semiconductor Manufacturing · 2013 · 18 citations

, , +17

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