Statistics
Publications
3
Citations
43
H-Index
3
Active since
2018
Affiliations
Lidia van Lent-Protasova is an author at Paul Scherrer Institute specializing in electrical engineering, interference lithography, and engineering.
Publications per year
2018–2021
3
3
Progress in EUV resists towards high-NA EUV lithography
Xiaolong Wang, Zuhal Taşdemir, Iacopo Mochi et al. · 2019 · 19 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +13
Evaluation of EUV resists for 5nm technology node and beyond
Zuhal Taşdemir, Iacopo Mochi, Lidia van Lent-Protasova et al. · 2018 · 10 citations
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