Zuhal Taşdemir

Integrated humidity sensor based on SU-8 polymer microdisk microresonator

Mustafa Eryürek, Zuhal Taşdemir, Yasin Karadağ et al. · Sensors and Actuators B Chemical · 2016 · 86 citations

Engineering, Microfabrication, Sensor Design +3

A deep etching mechanism for trench-bridging silicon nanowires

Zuhal Taşdemir, Nicole Wollschläger, W. Österle et al. · Nanotechnology · 2016 · 26 citations · Full text

Progress in EUV resists towards high-NA EUV lithography

Xiaolong Wang, Zuhal Taşdemir, Iacopo Mochi et al. · 2019 · 18 citations

High Resolution, Engineering, Electron-beam Lithography +16

State-of-the-art EUV materials and processes for the 7nm node and beyond

Elizabeth Buitrago, Marieke Meeuwissen, Oktay Yildirim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 17 citations · Full text

A new characterization approach to study the mechanical behavior of silicon nanowires

Sina Zare Pakzad, Mohammad Nasr Esfahani, Zuhal Taşdemir et al. · MRS Advances · 2021 · 16 citations · Full text

Materials Science, Silicon Nanowires, Nanoscale System +13