Gerd Ehret

Deflectometric systems for absolute flatness measurements at PTB

Gerd Ehret, Michael Schulz, Manuel Stavridis et al. · Measurement Science and Technology · 2012 · 53 citations

Engineering, Measurement, Microscopy +25

Scanning deflectometric form measurement avoiding path-dependent angle measurement errors

Michael Schulz, Gerd Ehret, Arne Fitzenreiter · Journal of the European Optical Society Rapid Publications · 2010 · 36 citations · Full text

Nanometer Accuracy, Accurate Topography Measurement, Engineering +19

Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB

Michael Schulz, Gerd Ehret, Manuel Stavridis et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 19 citations

Precision Measurement, Engineering, Capability Analysis +6

A nanoscale linewidth/pitch standard for high-resolution optical microscopy and other microscopic techniques

Uwe Huebner, W. Morgenroth, R. Boucher et al. · Measurement Science and Technology · 2007 · 16 citations

Engineering, Microscopy, New Lateral Standard +23

A new high-aperture 193 nm microscope for the traceable dimensional characterization of micro- and nanostructures

Gerd Ehret, Frank Pilarski, Detlef Bergmann et al. · Measurement Science and Technology · 2009 · 15 citations

Engineering, Microscopy, Optical Testing +22