Concepedia

Frank Pilarski

FP

3

Publications

65

Citations

3

H-Index

2007

Active since

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Frank Pilarski is an author at Physikalisch-Technische Bundesanstalt specializing in engineering, instrumentation, and photonic metrology.

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Publications per year

2007–2010

3

Publications

3

A new flexible scatterometer for critical dimension metrology

M. Wurm, Frank Pilarski, Bernd Bodermann · Review of Scientific Instruments · 2010 · 39 citations

, , +19

A new high-aperture 193 nm microscope for the traceable dimensional characterization of micro- and nanostructures

Gerd Ehret, Frank Pilarski, Detlef Bergmann et al. · Measurement Science and Technology · 2009 · 15 citations

, , +22

Metrology capabilities and performance of the new DUV scatterometer of the PTB

M. Wurm, Bernd Bodermann, Frank Pilarski · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

, , +20

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