Concepedia

M. Messana

MM

Statistics

Publications

7

Citations

172

H-Index

7

Active since

2007

Affiliations

Stanford University(Current)

University of California, Berkeley

Robert Bosch (United States)

Robert Bosch (Germany)

M. Messana is an author at Stanford University specializing in engineering, microelectromechanical systems, and microelectronics.

Publications per year

2007–2015

7

Publications

7

Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment

Vu A. Hong, S. Yoneoka, M. Messana et al. · Journal of Microelectromechanical Systems · 2014 · 34 citations

Engineering, Materials Engineering, Materials Science +17

The long path from MEMS resonators to timing products

E. Ng, Yushi Yang, Vu A. Hong et al. · 2015 · 32 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Si-SiO2 Composite MEMS Resonators in CMOS Compatible Wafer-scale Thin-Film Encapsulation

Bongsang Kim, Renata Melamud, Matthew A. Hopcroft et al. · 2007 · 32 citations

Engineering, Electrical Engineering, Materials Science +17

A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices

A.B. Graham, M. Messana, P.G. Hartwell et al. · Journal of Microelectromechanical Systems · 2009 · 23 citations

Engineering, Materials Engineering, Materials Science +17

Exploring the limits and practicality of Q-based temperature compensation for silicon resonators

J. Salvia, M. Messana, M. Ohline et al. · 2008 · 20 citations

Engineering, Electrical Engineering, Microelectronics +16

1–5 of 7