Concepedia

Timothy B. Michaelson

TB

Statistics

Publications

4

Citations

665

H-Index

4

Active since

1999

Affiliations

The University of Texas at Austin(Current)

Advanced Micro Devices (United States)

Timothy B. Michaelson is an author at The University of Texas at Austin specializing in engineering, applied physics, and microfabrication.

Top concepts

Engineering3D PrintingApplied PhysicsMaterial ScienceMicrofabricationMicroscopyPhotochemistryPolymer ScienceHealthMedicine

Publications per year

1999–2005

4

Publications

4

Step and flash imprint lithography: a new approach to high-resolution patterning

Matthew Colburn, Stephen C. Johnson, M. D. Stewart et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 560 citations

Engineering, Electron-beam Lithography, Microscopy +18

The effects of chemical gradients and photoresist composition on lithographically generated line edge roughness

Timothy B. Michaelson, Adam R. Pawloski, Alden Acheta et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 71 citations

Chemical Gradients, Engineering, Electron-beam Lithography +16

Understanding the role of base quenchers in photoresists

Timothy B. Michaelson, Andrew Jamieson, Adam R. Pawloski et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 19 citations

Engineering, Electron-beam Lithography, Chemical Composition +16

Using mesoscale simulation to explore photoresist line edge roughness

Jason Meiring, Timothy B. Michaelson, Andrew Jamieson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 15 citations

Engineering, Electron-beam Lithography, Microscopy +20

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