Concepedia

P. Letourneau

PL

3

Publications

132

Citations

3

H-Index

1993

Active since

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

P. Letourneau is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

1993–1995

3

Publications

3

High quality Si1−<i>x</i>−<i>y</i>Ge<i>x</i>C<i>y</i> epitaxial layers grown on (100) Si by rapid thermal chemical vapor deposition using methylsilane

Jing Mi, P. Warren, P. Letourneau et al. · Applied Physics Letters · 1995 · 80 citations

, , +10

Optimization of Thin Si Oxynitride Films Produced by Rapid Thermal Processing for Applications in EEPROMs

M. Dutoit, P. Letourneau, Jing Mi et al. · Journal of The Electrochemical Society · 1993 · 39 citations

, , +18

Thin SiO2 films nitrided by rapid thermal processing in NH3 or N2O for applications in EEPROMs

M. Dutoit, D. Bouvet, Jing Mi et al. · Microelectronics Journal · 1994 · 13 citations

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