Thin SiO2 films nitrided by rapid thermal processing in NH3 or N2O for applications in EEPROMs - Concepedia

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Thin SiO2 films nitrided by rapid thermal processing in NH3 or N2O for applications in EEPROMs

13

Citations

25

References

1994

Year

M. Dutoit, D. Bouvet, Jing Mi, N. Novkovski, P. Letourneau

Microelectronics Journal

References

	Year	Citations

Page 1