Concepedia

Ayumi Masada

AM

Statistics

Publications

3

Citations

71

H-Index

3

Active since

2017

Affiliations

Sumco Corporation (Japan)(Current)

Ayumi Masada is an author at Sumco Corporation (Japan) specializing in applied physics, engineering, and hydrogen.

Top concepts

EngineeringApplied PhysicsHydrogenChemistryMicroelectronicsCrystalline DefectsElectrical EngineeringEnergyPhysicsNanoelectronics

Publications per year

2017–2017

3

Publications

3

Trapping and diffusion kinetic of hydrogen in carbon-cluster ion-implantation projected range in Czochralski silicon wafers

Ryosuke Okuyama, Ayumi Masada, Takeshi Kadono et al. · Japanese Journal of Applied Physics · 2017 · 36 citations

Ion Implantation, Engineering, Crystalline Defects +15

Trapping and diffusion behaviour of hydrogen simulated with TCAD in projection range of carbon‐cluster implanted silicon epitaxial wafers for CMOS image sensors

Ryosuke Okuyama, Satoshi Shigematsu, Ryo Hirose et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2017 · 19 citations

Semiconductor Technology, Electrical Engineering, Engineering +13

Effect of dose and size on defect engineering in carbon cluster implanted silicon wafers

Ryosuke Okuyama, Ayumi Masada, Satoshi Shigematsu et al. · Japanese Journal of Applied Physics · 2017 · 16 citations · Full text

Bulk Crystalline Silicon, Engineering, Carbon-cluster-ion-implanted Defects +19

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