Aiko Sato

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Active since

2005

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Aiko Sato is an author at National Institute of Advanced Industrial Science and Technology specializing in materials science, semiconductor materials, and electronic materials.

Publications per year

2005–2022

Publications

Highly stabilized hydrogenated amorphous silicon solar cells fabricated by triode-plasma CVD

Hiroyuki Sonobe, Aiko Sato, Satoshi Shimizu et al. · Thin Solid Films · 2005 · 33 citations

Engineering, Materials Engineering, Materials Science +14

Low-damage low-k etching with an environmentally friendly CF3I plasma

E. Soda, Seiichi Kondo, Shuichi Saito et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +16

Two-dimensional simulation of interdigitated back contact silicon heterojunction solar cells having overlapped p/i and n/i a-Si:H layers

H. Noge, Kimihiko Saito, Aiko Sato et al. · Japanese Journal of Applied Physics · 2015 · 17 citations

Engineering, Electrical Engineering, Materials Science +17

Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer

Shota Nunomura, Isao Sakata, Aiko Sato et al. · Journal of Physics and Chemistry of Solids · 2021 · 11 citations

Engineering, Materials Engineering, Materials Science +16

Ion-induced interface defects in a-Si:H/c-Si heterojunction: possible roles and kinetics of hot mobile hydrogens

Shota Nunomura, Takayoshi Tsutsumi, Kazuya Nakane et al. · Japanese Journal of Applied Physics · 2022 · 11 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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