Statistics
Publications
1
Citations
11
H-Index
1
Active since
1999
Affiliations
Toshiba (Japan)(Current)
Kiminobu Akeno is an author at Toshiba (Japan) specializing in electronic packaging, 3d printing, and instrumentation.
Publications per year
1999–1999
1
1
Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations
Engineering, Electron-beam Lithography, Target Fabrication +16
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