Concepedia

Douglas R. Ritchie

DR

Statistics

Publications

3

Citations

41

H-Index

3

Active since

1978

Affiliations

Burroughs Wellcome Fund(Current)

Douglas R. Ritchie is an author at Burroughs Wellcome Fund specializing in semiconductor devices, materials science, and engineering.

Publications per year

1978–1990

3

Publications

3

Deep-UV wafer stepper with through-the-lens wafer to reticle alignment

S. Wittekoek, Martin A. van den Brink, H. F. D. Linders et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations

, , +12

Sub-half-micron deep-UV lithography using wet and dry developable resist schemes

Maaike Op de Beeck, Nandasiri Samarakone, Ki‐Ho Baik et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 13 citations

, , +11

An advanced MOS-IC process technology using local oxidation ot oxygen-doped polysilicon films

T. Yamaguchi, K. L. Seaward, J. Sachitano et al. · IEEE Journal of Solid-State Circuits · 1978 · 12 citations

, , +17

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