Concepedia

Masaru Takabatake

MT

6

Publications

215

Citations

6

H-Index

1989

Active since

Affiliations

Hitachi (Japan)(Current)

Masaru Takabatake is an author at Hitachi (Japan) specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringThin FilmsSurface ScienceMaterial ScienceMicroelectronicsDisplay TechnologyIntegrated CircuitsVlsi Design

Publications per year

1989–1996

6

Publications

6

CMOS circuits for peripheral circuit integrated poly-Si TFT LCD fabricated at low temperature below 600 degrees C

Masaru Takabatake, J.-I. Ohwada, Yūichi Ono et al. · IEEE Transactions on Electron Devices · 1991 · 71 citations

Engineering, Vlsi Design, Cmos Buffers +19

Peripheral circuit integrated poly-Si TFT LCD with gray scale representation

J.-I. Ohwada, Masaru Takabatake, Yuichi Ono et al. · IEEE Transactions on Electron Devices · 1989 · 51 citations

Electrical Engineering, Thin-film Transistor, Vlsi Design +11

Structural Change during Annealing of Amorphous Indium-Tin Oxide Films Deposited by Sputtering with H<sub>2</sub>O Addition

Etsuko Nishimura, Masahiko Ando, Ken‐ichi Onisawa et al. · Japanese Journal of Applied Physics · 1996 · 38 citations

Engineering, Thin Film Process Technology, Semiconductors +16

Indium Tin Oxide Dry Etching Using HBr Gas for Thin‐Film Transistor Liquid Crystal Displays

Masaru Takabatake, Y. Wakui, Nobutake Konishi · Journal of The Electrochemical Society · 1995 · 28 citations

Engineering, Dry Etching Technique, Thin Film Process Technology +17

Roles of bonded hydrogens and oxygen vacancies on crystallization of hydrogenated amorphous indium tin oxide (a-ITO:H) films

Masahiko Ando, Masaru Takabatake, Etsuko Nishimura et al. · Journal of Non-Crystalline Solids · 1996 · 17 citations

Materials Engineering, Materials Science, Oxygen Vacancies +9

Rows per page

1–5 of 6