T. Tanimura - Concepedia

Author

T. Tanimura

Also Known As

T. Tanimura, Tatsuhiko Tanimura

Publications

108

Citations

H-Index

Concepts

All Affiliations

T. Tanimura is an author at Japan Science and Technology Agency specializing in engineering, applied physics, and surface science.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	82
2	Applied Physics	5	5	82
3	Electrical Engineering	2	2	36
4	Natural Sciences	1	1	24
5	Chemistry	1	1	24

T. Tanimura

Publications

Citations

H-Index

Page 1

	Year	Citations
Control of oxidation and reduction reactions at HfSiO∕Si interfaces through N exposure or incorporation H. Kamada, T. Tanimura, Satoshi Toyoda, Applied Physics Letters Reduction ReactionsEngineeringOxidation ResistanceChemistryAnnealed Hfsio	2008	24
Effect of microwave plasma treatment on silicon dioxide films grown by atomic layer deposition at low temperature T. Tanimura, Yuichiro Watanabe, Yoshihiro Sato, Journal of Applied Physics EngineeringSilicon Dioxide FilmsChemical DepositionPlasma ProcessingPlasma Energy	2013	19
Annealing effects of in-depth profile and band discontinuity in TiN/LaO/HfSiO/SiO2/Si gate stack structure studied by angle-resolved photoemission spectroscopy from backside Satoshi Toyoda, Hitoshi Kamada, T. Tanimura, Applied Physics Letters Band DiscontinuityElectrical EngineeringAnnealing EffectsEngineeringPhysics	2010	17
Photoinduced charge-trapping phenomena in metal/high-k gate stack structures studied by synchrotron radiation photoemission spectroscopy T. Tanimura, Satoshi Toyoda, H. Kamada, Applied Physics Letters EngineeringTunneling MicroscopyPhysicsHfsion FilmNanoelectronics	2010	12
Thermal stability in a-Si/HfSiO(N)/Si gate stack structures studied by photoemission spectroscopy using synchrotron radiation Satoshi Toyoda, Hitoshi Kamada, T. Tanimura, Applied Physics Letters EngineeringSilicon On InsulatorSemiconductor DeviceHfsion FilmsThermal Stability	2008	10

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