Vincent Ah-Leung

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Active since

2016

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Université Grenoble Alpes

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

STMicroelectronics (France)

CEA Grenoble

Vincent Ah-Leung is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in plasma etching, silicon nitride, and silicon etching.

Publications per year

2016–2017

Publications

Thin layer etching of silicon nitride: A comprehensive study of selective removal using NH3/NF3 remote plasma

N. Possémé, Vincent Ah-Leung, Olivier Pollet et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 43 citations

Engineering, Materials Engineering, Materials Science +17

Understanding of a new approach for silicon nitride spacer etching using gaseous hydrofluoric acid after hydrogen ion implantation

Vincent Ah-Leung, Olivier Pollet, N. Possémé et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 18 citations

Engineering, Electrical Engineering, Materials Science +17

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