Concepedia

Andrew R. Romano

AR

9

Publications

162

Citations

9

H-Index

2001

Active since

Affiliations

SunEdison (United States)(Current)

Clariant (United States)

University of Toronto

The University of Texas at Austin

Andrew R. Romano is an author at SunEdison (United States) specializing in engineering, materials science, and surface science.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicrofabricationElectronic PackagingChemistryWater TreatmentMicroelectronicsChemical Engineering

Publications per year

2001–2019

9

Publications

9

Dynamic Nash Equilibrium Seeking for Higher-Order Integrators in Networks

Andrew R. Romano, Lacra Pavel · 2019 · 36 citations

Mathematical Programming, Engineering, Networked Control +17

193 nm Immersion Lithography-Taking the Plunge

Ralph R. Dammel, F. M. Houlihan, Raj Sakamuri et al. · Journal of Photopolymer Science and Technology · 2004 · 30 citations · Full text

Optical Materials, Engineering, Electron-beam Lithography +18

Understanding the photoresist surface-liquid interface for ArF immersion lithography

Will Conley, Robert J. LeSuer, Frank F. Fan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 20 citations

Engineering, Electron-beam Lithography, Chemistry +21

Resist component leaching in 193-nm immersion lithography

Ralph R. Dammel, Georg Pawlowski, Andrew R. Romano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 15 citations

Ionic Pags, Engineering, Electron-beam Lithography +21

Leaching Phenomena and their Suppresion in 193 nm Immersion Lithography

Ralph R. Dammel, Georg Pawlowski, Andrew R. Romano et al. · Journal of Photopolymer Science and Technology · 2005 · 14 citations · Full text

Ionic Pags, Engineering, Electron-beam Lithography +21

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