Concepedia

Nobuo Ozawa

NO

8

Publications

161

Citations

8

H-Index

1985

Active since

Affiliations

Oki Electric Industry (Japan)(Current)

Nobuo Ozawa is an author at Oki Electric Industry (Japan) specializing in materials science, applied physics, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceChemistrySurface ScienceChemical EngineeringMaterials EngineeringMicroelectronicsMicrofabricationSurface Chemistry

Publications per year

1985–2003

8

Publications

8

Deep Level Generation-Annihilation in Nitrogen Doped FZ Crystals

Takao Abé, Hidekiyo Harada, Nobuo Ozawa et al. · MRS Proceedings · 1985 · 43 citations

Engineering, Physics, Crystal Growth Technology +3

LiNbO3 with ilmenite-type structure prepared via ion-exchange reaction

Nobuhiro Kumada, Nobuo Ozawa, Fumio Muto et al. · Journal of Solid State Chemistry · 1985 · 32 citations

Materials Science, Solid-state Ionic, Ilmenite-type Structure

Mechanisms of Surface Reaction in Fluorocarbon Dry Etching of Silicon Dioxide-An Effect of Thermal Excitation

Naokatsu Ikegami, Nobuo Ozawa, Yasuhiro Miyakawa et al. · Japanese Journal of Applied Physics · 1992 · 18 citations

Engineering, Vacuum Device, Chemistry +24

Preparation of pyrochlores. A1−xHxTaO3·nH2O (A=Na, K)

Nobuhiro Kumada, Nobuo Ozawa, Nobukazu Kinomura et al. · Materials Research Bulletin · 1985 · 15 citations

Mineral Processing, Inorganic Chemistry, Chemistry +1

Investigation of ion transportation in high-aspect-ratio holes from fluorocarbon plasma for SiO2 etching

Shuichi Noda, Nobuo Ozawa, Takashi Kinoshita et al. · Thin Solid Films · 2000 · 14 citations

Materials Science, Fluorocarbon Plasma, Engineering +10

Rows per page

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