Concepedia

Yasuhiro Miyakawa

YM

2

Publications

31

Citations

2

H-Index

1991

Active since

Affiliations

Oki Electric Industry (Japan)(Current)

Yasuhiro Miyakawa is an author at Oki Electric Industry (Japan) specializing in applied physics, engineering, and materials engineering.

Top concepts

ChemistryEngineeringApplied PhysicsSurface ScienceMaterial ScienceSurface ChemistryChemical EngineeringMaterials EngineeringNanoelectronicsMicroelectronics

Publications per year

1991–1992

2

Publications

2

Mechanisms of Surface Reaction in Fluorocarbon Dry Etching of Silicon Dioxide-An Effect of Thermal Excitation

Naokatsu Ikegami, Nobuo Ozawa, Yasuhiro Miyakawa et al. · Japanese Journal of Applied Physics · 1992 · 18 citations

Engineering, Vacuum Device, Chemistry +24

Mechanisms of High PSG/SiO<sub>2</sub> Selective Etching in a Highly Polymerized Fluorocarbon Plasma

Naokatsu Ikegami, Nobuo Ozawa, Yasuhiro Miyakawa et al. · Japanese Journal of Applied Physics · 1991 · 13 citations

Materials Science, Materials Engineering, Chemical Engineering +13

Rows per page

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