3
Publications
162
Citations
3
H-Index
1989
Active since
Affiliations
M. Mändl is an author at Siemens (Germany) specializing in engineering, applied physics, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrostructureMaterials EngineeringPhysicsNanoelectronicsMicroelectronicsMicrofabrication
Publications per year
1989–1992
3
3
Investigation of surface amorphization of silicon wafers during ion-milling
T. Schuhrke, M. Mändl, J. Zweck et al. · Ultramicroscopy · 1992 · 27 citations
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