T. Schuhrke is an author at University of Regensburg specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicrofabricationMaterials Engineering
Publications per year
1992–1994
2
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Investigation of surface amorphization of silicon wafers during ion-milling
T. Schuhrke, M. Mändl, J. Zweck et al. · Ultramicroscopy · 1992 · 27 citations
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