Anthony Schepis

Computational aspects of optical lithography extension by directed self-assembly

Kafai Lai, Chi‐Chun Liu, Jed W. Pitera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Towards electrical testable SOI devices using Directed Self-Assembly for fin formation

Chi‐Chun Liu, Cristina Estrada-Raygoza, Hong He et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 20 citations

Engineering, Manufacturing Engineering, Electronic Materials +13

Computational lithography platform for 193i-guided directed self-assembly

Kafai Lai, Melih Ozlem, Jed W. Pitera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

Engineering, Computer Engineering, Manufacturing Engineering +11

Directed self-assembly process implementation in a 300mm pilot line environment

Chi‐Chun Liu, Isabel C Estrada-Raygoza, Jassem Abdallah et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations

Engineering, Materials Engineering, Materials Science +17