Melih Ozlem

Publications

Citations

H-Index

2013

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

IBM Research - Almaden

Melih Ozlem is an author at IBM Research - Thomas J. Watson Research Center specializing in microelectronics, computer engineering, and microfabrication.

Top concepts

3D PrintingEngineeringSelf-assemblyApplied PhysicsHardware SystemsMaterial ScienceMicroelectronicsMicrofabricationOptical MaterialsIntegrated Circuits

Publications per year

2013–2014

Publications

Computational aspects of optical lithography extension by directed self-assembly

Kafai Lai, Chi‐Chun Liu, Jed W. Pitera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Computational lithography platform for 193i-guided directed self-assembly

Kafai Lai, Melih Ozlem, Jed W. Pitera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

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