Concepedia

Author

Melih Ozlem

IBM Research - Thomas J. Watson Research Center

Also Known As

Melih Ozlem

6

Publications

48

Citations

3

H-Index

12

Concepts

All Affiliations

IBM Research - Thomas J. Watson Research CenterIBM (United States)IBM Research - Almaden
MO

About

Melih Ozlem is an author at IBM Research - Thomas J. Watson Research Center specializing in microelectronics, computer engineering, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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2

Applied Physics

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1

26

3

Computer Engineering

1

1

26

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Materials Science

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Hardware Systems

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26

Melih Ozlem

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2

Publications

38

Citations

2

H-Index

YearCitations

Computational aspects of optical lithography extension by directed self-assembly

Kafai Lai, Chi‐Chun Liu, Jed W. Pitera,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

26

Computational lithography platform for 193i-guided directed self-assembly

Kafai Lai, Melih Ozlem, Jed W. Pitera,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2014

12

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