Yi-Pei Tsai

Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin et al. · Nanoscale Research Letters · 2017 · 26 citations · Full text

Engineering, Electrical Engineering, Microelectronics +12

Wafer-Level Mapping of Plasma-Induced Charging Effect by On-Chip <italic>In Situ</italic> Recorders in FinFET Technologies

Yi-Pei Tsai, Chun‐Hsiung Wu, Chrong Jung Lin et al. · IEEE Transactions on Electron Devices · 2016 · 18 citations

Engineering, Electrical Engineering, Physics +16

Mapping of wafer-level plasma induced charge contour by novel on-chip in-situ recorders in advance FinFET technologies

Chun‐Hsiung Wu, Yi-Pei Tsai, Chrong Jung Lin et al. · 2015 · 14 citations

Engineering, Electrical Engineering, Physics +13

7nm FinFET Plasma Charge Recording Device

Yi-Pei Tsai, Jiaw‐Ren Shih, Ya‐Chin King et al. · 2018 · 11 citations

Engineering, Electrical Engineering, Physics +15

On-Wafer FinFET-Based EUV/eBeam Detector Arrays for Advanced Lithography Processes

Chien‐Ping Wang, Yi-Pei Tsai, Burn J. Lin et al. · IEEE Transactions on Electron Devices · 2020 · 10 citations

Engineering, Electrical Engineering, Microelectronics +16