Concepedia
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Publications
3
Citations
69
H-Index
Active since
2006
Affiliations
Toshiba (Japan)(Current)
Dai Nippon Printing (Japan)
Kosuke Takai is an author at Toshiba (Japan) specializing in applied physics, microelectronics, and engineering.
Top concepts
EngineeringApplied PhysicsMicroelectronicsOptoelectronicsMicrofabricationComputer EngineeringElectronic PackagingNanomaterialsNanotechnologyNanoelectronics
Publications per year
2006–2014
Nanoelectromechanical nonvolatile memory device incorporating nanocrystalline Si dots
Yoshishige Tsuchiya, Kosuke Takai, N. Momo et al. · Journal of Applied Physics · 2006 · 46 citations
Finite Element Method, Electrical Engineering, Nc-si Dots +14
Capability of etched multilayer EUV mask fabrication
Kosuke Takai, Koji Murano, Takashi Kamo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations
Engineering, Electron-beam Lithography, Beam Lithography +11
Patterning of EUVL binary etched multilayer mask
Kosuke Takai, Takeharu Motokawa, Koji Murano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Electron-beam Lithography, Multilayer Mask +16
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