Concepedia

Koji Murano

KM

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Publications

2

Citations

23

H-Index

2

Active since

2013

Affiliations

Dai Nippon Printing (Japan)(Current)

Toshiba (Japan)

Koji Murano is an author at Dai Nippon Printing (Japan) specializing in electronic packaging, optoelectronics, and microelectronics.

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Publications per year

2013–2014

2

Publications

2

Capability of etched multilayer EUV mask fabrication

Kosuke Takai, Koji Murano, Takashi Kamo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

, , +11

Patterning of EUVL binary etched multilayer mask

Kosuke Takai, Takeharu Motokawa, Koji Murano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations

, , +16

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