Concepedia

William A. Muth

WA

Statistics

Publications

4

Citations

59

H-Index

4

Active since

1990

Affiliations

IBM (United States)(Current)

William A. Muth is an author at IBM (United States) specializing in metrology, engineering, and overlay metrology.

Publications per year

1990–2010

4

Publications

4

Multi-layer overlay metrology

Christopher P. Ausschnitt, J. Morningstar, William A. Muth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 18 citations

Engineering, Mechatronics Engineering, Metrology +11

<title>Accuracy of overlay measurements: tool and mark asymmetry effects</title>

Daniel J. Coleman, Patricia J. Larson, Alexander D. Lopata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 14 citations

Engineering, Manufacturing Engineering, Instrumentation +15

Smaller, smarter, faster, and more accurate: the new overlay metrology

Nelson Felix, Allen H. Gabor, William A. Muth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Engineering, Electrical Engineering, Metrology +14

Blossom overlay metrology implementation

Christopher P. Ausschnitt, W. H. Chu, D. Kolor et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 13 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +12

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