Concepedia

Author

Nobuyuki Shigeeda

Tohoku University

Also Known As

N. Shigeeda, Nobuyuki SHIGEEDA, Nobuyuki Shigeeda

4

Publications

114

Citations

3

H-Index

13

Concepts

All Affiliations

Tohoku University
NS

About

Nobuyuki Shigeeda is an author at Tohoku University specializing in applied physics, surface science, and chemical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

104

2

Applied Physics

2

2

104

3

Chemical Engineering

2

2

104

4

Chemistry

1

1

37

5

Materials Engineering

1

1

67

Nobuyuki Shigeeda

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3

Publications

114

Citations

3

H-Index

YearCitations

Complete planarization of via holes with aluminum by selective and nonselective chemical vapor deposition

Kazuo Tsubouchi, Kazuya Masu, Nobuyuki Shigeeda,

Applied Physics Letters

1990

67

Selective deposition of aluminum from selectively excited metalorganic source by the rf plasma

Kazuya Masu, Kazuo Tsubouchi, Nobuyuki Shigeeda,

Applied Physics Letters

1990

37

Selective and nonselective deposition of aluminum by LPCVD using DMAH and microregion observation of single crystal aluminum with scanning μ-RHEED microscope

K. Tsubouchi, Kazuya Masu, Nobuyuki Shigeeda,

1990

10

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