Concepedia

Nobuyuki Shigeeda

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Statistics

Publications

3

Citations

114

H-Index

3

Active since

1990

Affiliations

Tohoku University(Current)

Nobuyuki Shigeeda is an author at Tohoku University specializing in applied physics, surface science, and chemical engineering.

Top concepts

Publications per year

1990–1990

3

Publications

3

Complete planarization of via holes with aluminum by selective and nonselective chemical vapor deposition

Kazuo Tsubouchi, Kazuya Masu, Nobuyuki Shigeeda et al. · Applied Physics Letters · 1990 · 67 citations

, , +18

Selective deposition of aluminum from selectively excited metalorganic source by the rf plasma

Kazuya Masu, Kazuo Tsubouchi, Nobuyuki Shigeeda et al. · Applied Physics Letters · 1990 · 37 citations

, , +16

Selective and nonselective deposition of aluminum by LPCVD using DMAH and microregion observation of single crystal aluminum with scanning μ-RHEED microscope

K. Tsubouchi, Kazuya Masu, Nobuyuki Shigeeda et al. · 1990 · 10 citations

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