Concepedia
Statistics
Publications
38
Citations
1.1K
H-Index
18
Active since
1976
Affiliations
Tohoku University(Current)
Toyama College
NGK Insulators (Japan)
National Institute of Technology, Toyama College
Kazuo Tsubouchi is an author at Tohoku University specializing in materials science, natural sciences, and materials engineering.
Publications per year
1976–2019
Epitaxial Growth of Aluminum Nitride on Sapphire Using Metalorganic Chemical Vapor Deposition
Mizuho Morita, Norihiko Uesugi, Seiji Isogai et al. · Japanese Journal of Applied Physics · 1981 · 129 citations
Natural Sciences, Materials Engineering, Materials Science +17
Aluminum Nitride Epitaxially Grown on Silicon: Orientation Relationships
Mizuho Morita, Seiji Isogai, N. Shimizu et al. · Japanese Journal of Applied Physics · 1981 · 81 citations
Complete planarization of via holes with aluminum by selective and nonselective chemical vapor deposition
Kazuo Tsubouchi, Kazuya Masu, Nobuyuki Shigeeda et al. · Applied Physics Letters · 1990 · 67 citations · Full text
Epitaxial Growth of AlN Film with an Initial-Nitriding Layer on α-Al<sub>2</sub>O<sub>3</sub> Substrate
Hiroshi Kawakami, Katsuhito Sakurai, Kazuo Tsubouchi et al. · Japanese Journal of Applied Physics · 1988 · 66 citations
Selective aluminum chemical vapor deposition
Kazuo Tsubouchi, Kazuya Masu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 55 citations · Full text
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