S. Murad

Dry etching damage in III–V semiconductors

S. Murad, M. Rahman, Noah M. Johnson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 52 citations

Engineering, Electrical Engineering, Materials Science +17

Generic scanned-probe microscope sensors by combined micromachining and electron-beam lithography

Haiping Zhou, A. Midha, Gordon B. Mills et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 42 citations

Engineering, Materials Science, Mechanical Engineering +14

Control of silica cap properties by oxygen plasma treatment for single-cap selective impurity free vacancy disordering

Amr S. Helmy, S. Murad, A.C. Bryce et al. · Applied Physics Letters · 1999 · 36 citations

Engineering, Materials Engineering, Materials Science +17

Reliability and degradation mechanism of AlGaN/GaN HEMTs for next generation mobile communication systems

M. Dammann, W. Pletschen, Patrick Waltereit et al. · Microelectronics Reliability · 2009 · 29 citations

Engineering, Electrical Engineering, Materials Science +16

Selective reactive ion etching of InGaAs and InP over InAlAs in SiCl4/SiF4/HBr plasmas

S. Murad, S. P. Beaumont, M. Holland et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +14